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Low-Cost Amorphous Silicon Manufacturing for Digital Mammography and Other Uses

Partnering Organizations: General Electric Global Research
Schenectady, NY
Perkin Elmer (formerly EG&G Reticon)
Boxborough, MA
Project Duration and Cost:
  • 1995-2000
  • ATP funding amount: $ 1.6 M
  • GE and Perkin Elmer cost-share amount: $ 1.8 M
Project Brief:  95-01-0152
Status Report of the Completed Project: None
Banner with Success Story text.
The Challenge
Throughout the early 1990’s GE’s central R&D lab, GE Global Research, began the basic research for the use of amorphous silicon detectors in digital medical imaging with funding from a number of government agencies including DARPA, U.S. Army, U.S. Navy, and Department of Health and Human Services. By the mid-1990’s, the low cost manufacturing technology was still in GE’s lab and the existing cost of manufacturing was so high that only a limited number of high end applications such as cardiac imaging, were feasible. If the cost of manufacturing amorphous silicon could be reduced enough, it would enable detectors with a wide range of applications, not just from medical imaging but also in industrial uses such as non-destructive testing.

While GE scientists conceived of ways to bring the cost of manufacturing down, according to GE Vice President Lewis Edelheit:

“Getting internal support for the low cost manufacturing proposal was hard. At the time it was difficult for some executives to see the advantages of taking digital imaging beyond cardiac applications. Also the combining of process steps in the fabrication of amorphous silicon integrated circuits was considered to be a high risk proposition.”

Thus, in 1995, GE, with its manufacturing partner Perkin Elmer, applied for and received an ATP award due to the high level of risk, innovation, and potential for national benefits that the project proposed. According to Edelheit:

"Given the technical and other risks, had the ATP turned down the proposal, the promising, low-cost manufacturing process initiative would have been shelved."
Technical and Economic Impacts
In the ATP-funded project, GE successfully completed most of the ambitious technical goals. Major accomplishments include:
  • Reducing the total number of process steps from 300 to 200
  • Reducing the total number of mask steps, the critical manufacturing challenge, from 11 steps to 7
  • Reducing the total cost of the process by 25%
  • Filing for and receiving three patents

However, when the ATP project was finished in 2000, there was still a significant amount of research to do before the technology could be ready for commercial application. Although this technology had needed a full decade of government support from a variety of different agencies, the ATP project helped the private sector participants overcome the technical uncertainties and stimulated internal interest that was not there before. Two years after project completion, the partners continued investing millions of dollars into the technology with no additional government funds.

In addition, prior to the ATP project, the low cost manufacturing technology was held by GE’s corporate lab. Through the ATP project, GE was able to transfer the technology to Perkin Elmer. Instead of being the manufacturer, GE made the strategic decision to be an end user of the technology, and allowed Perkin Elmer to focus on the manufacturing, where it could then sell the detectors to a wide variety of other users.

In January of 2004, nearly ten years after the companies began working together on the ATP project, Perkin Elmer signed a $250 million deal to supply GE with amorphous silicon flat panel detectors, where:

  • GE Medical Systems will use these in a variety of medical cost-sensitive medical applications
  • GE Aircraft Engines will use the detectors for non-destructive testing

The medical applications are focused on digital mammography and digital radiography. The major benefits of these uses include:

  • Superior breast cancer detection through lower false positives and fewer unnecessary biopsies
  • Reduced radiation exposure
  • Reduced medical costs through enhanced clinical productivity

The potential economic impact of the digital mammography applications alone is large—a rigorous cost-benefit study 1 estimated economic impacts between $219 million and $339 million, and a benefit-to-cost range of 125:1 to 193:1.

The enabling technology that ATP has funded has created even broader benefits, as Perkin Elmer is pursuing sales of the amorphous silicon detectors to users who will apply this toward:

  • Industrial non-destructive testing (NDT)
  • PCB inspection
  • Pipeline inspection
  • Bone densitometry and veterinary imaging
  • Airport and customs cargo inspection for homeland security

1 Pelsoci, Thomas, Low-Cost Manufacturing Process Technology for Amorphous Silicon Detector Panels: Applications in Digital Mammography and Radiography, Prospective Economic Case Study for an ATP-Funded Project, NIST GCR 03-844, February 2003. 

Date created:  June 1, 2005
Last updated: August 21, 2006
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