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Microelectronics Manufacturing Infrastructure Workshop
ATP Fall Meeting - Tentative Agenda
November 18, 1998

TIME PRESENTER TITLE
1:30 Purabi Mazumdar, ATP Welcome, Goals, ATP Update
1:45 Carlos Grinspon, ATP ATP Project Selection Criteria
2:00 Diane K. Stewart, Micrion Corporation
and
Robert Perlmutter, KLA-Tencor Corporation		 Preparing a Competitive Proposal and the ATP Process: Views from Recent Awardees
2:40 Discussions on ATP Selection Process
3:10 Break
3:30 Coordinated by Gilbert V. Herrera, SEMI/SEMATECH Discussions on technical and business issues: lithography beyond 100 nm

Date created: October 1998
Last updated: April 12, 2005
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