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Performance
of 50 Completed ATP Projects
Status
Report - Number 2
NIST SP 950-2
Chapter
4 - Electronics, Computer Hardware & Communications
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Hampshire
Instruments, Inc.
(Joint Venture)
Large-Scale Diode-Array Laser
Technology for X-Ray Lithography
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| Today’s
stamp-size computer chips are made by lithography systems that project
ultraviolet (UV) or deep-UV light through stencil-like masks onto
silicon wafers to produce the tiny components of integrated circuits
(ICs) or chips. To make higher-performing ICs, more transistors and
denser circuitry will have to be packed onto each chip. |
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COMPOSITE
PERFORMANCE SCORE
(Based on a four star rating.)
No Stars
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Ever Smaller, Denser
Computer Chips
Today’s densest chips have feature sizes of about 0.15 mm, which
can barely be produced with deep-UV lithography. To make even smaller
chips, the next generation of lithography equipment may use x-rays, which
have shorter wavelengths than visible or UV light. Shorter wavelengths
are needed to make tinier features.
An Inexpensive Laser
Approach
X-ray lithography able to make chip features of 0.10 mm and smaller was
demonstrated prior to the start of this project in 1991. But cost-effective
x-ray lithography systems capable of large-scale IC manufacturing were
not available. Research had shown that a relatively inexpensive device
using a high-energy laser to stimulate x-ray emission could be used to
produce x-rays. Suitable material (neodymium-doped gadolinium gallium
garnet, or Nd:GGG) for this type of laser was available. However, the
inability to precisely control the energy used to pump up the material’s
energy level was a key problem in making such a laser work.
This ATP joint venture
project by Hampshire Instruments and McDonnell Douglas Corporation (MDC),
with help from Lawrence Livermore National Laboratory, solved the control
problem by developing methods for using powerful arrays of laser diodes
to pump Nd:GGG in a laser-based x-ray lithography system. Hampshire, a
small New York company, contributed its laser design expertise. MDC provided
expertise in system design and the design of the critical high-power laser-diode
pump. It also provided the world’s largest laser-diode module manufacturing
capacity to support post-project commercialization goals.
Prior to the ATP-funded
work, MDC built a prototype laser-diode pump system with a peak power
output of more than 300 kW. The system was successfully used to pump a
Hampshire laser being developed for a second-generation x-ray lithography
system, and its pumping was significantly more efficient than that of
the flash lamps Hampshire had used in its first-generation x-ray lithography
system. In addition, life testing of laser-diode pump systems showed they
lasted much longer than the longest-lasting flash lamps then available.
Doubling the Peak
Power Output
During the ATP project, MDC built two prototype laser-diode pump systems
that each delivered more than 750 kW of peak power, by far the highest
laser-diode power produced by any device then or now. Both met or exceeded
all performance and reliability specifications. MDC kept one pump and
delivered the other to Lawrence Livermore for testing in the second-generation
x-ray lithography system being developed by the lab and Hampshire. The
pump, however, was never integrated with the Hampshire laser. Flash lamps
with longer life became available, leading Lawrence Livermore to shift
its focus to flash-lamp pumping of the laser. The lab continues to develop
x-ray lithography.
High
Expectations Dashed by Bankruptcy
Evidence at the start of the project suggested the ATP-funded technology
would be rapidly commercialized if it could be successfully developed
and demonstrated. Hampshire and MDC planned to sell the new x-ray lithography
system in a worldwide market expected, when the proposal was written,
to exceed $1.5 billion by 1994. They also hoped to sell the technology
in solid-state laser markets.
Hampshire, however,
ran into serious financial problems and failed to raise the additional
funds needed to survive. The company declared bankruptcy and was liquidated.
The New York Job Development Authority assumed ownership of practically
all Hampshire assets, including its intellectual property. For a time,
several organizations expressed interest in acquiring the technology,
but none completed the acquisition. MDC intended to commercialize its
laser-diode pumps for a variety of applications. With Hampshire’s
demise, that plan did not materialize. There is currently no effort to
commercialize the ATP-funded technology, either by Boeing (MDC) or government
agencies. But this may change with renewed interest in x-ray lithography
in the future.
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Project
Highlights
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PROJECT:
To develop a laser-diode-pumped laser system for generating x-rays
in a new generation of lithography equipment to enable a major advance
in the miniaturization of computer chips while reducing manufacturing
costs.
Duration: 7/1/1991 — 9/30/1992
ATP Number: 90-01-0126
FUNDING (in
thousands):
| ATP |
$926
|
50%
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| Company |
930
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50%
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| Total |
$1,856
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ACCOMPLISHMENTS:
Researchers demonstrated the feasibility of using a powerful laser-diode-array
to pump up the energy level of Nd:GGG (neodymium-doped gadolinium
gallium garnet) in a laser intended for use in producing x-rays.
Such a laser could be scaled up to meet the technical, reliability
and affordability requirements for third-generation x-ray lithography
systems. All planned tasks were accomplished. The company presented
some results at the Advanced Solid State Laser Conference in 1992.
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COMMERCIALIZATION
STATUS:
No attempt to commercialize the technology has occurred. Soon after
the ATP project was completed, Hampshire ran into serious financial
problems, declared bankruptcy and was liquidated. The company’s
demise halted the effort to develop this type of laser-based x-ray
lithography and led to the collapse of MDC’s laser-diode business.
OUTLOOK:
The New York Job Development Authority — which now owns practically
all Hampshire assets, including intellectual property — shows
no intention to commercialize the technology. Neither does MDC (Boeing).
The semiconductor industry has shifted some of its attention from
x-ray lithography to competing technologies such as deep ultraviolet
(DUV) lithography utilizing excimer lasers. However, given the expectation
that feature resolution limits of DUV lithography will be reached
in a few years, x-ray lithography continues to arouse interest.
If the industry comes to view the x-ray approach as a viable candidate
for a new generation of lithography equipment, the technology developed
in this ATP project could be revisited.
Composite
Performance Score:
No Stars
COMPANIES:
Hampshire Instruments, Inc.
(joint venture lead)
Since April 25, 1993, no longer in business
Other joint venture participant:
McDonnell Douglas Corporation (MDC), now merged with:
The Boeing Company
5000 E. McDowell Road
Mesa, AZ 85215-9797
Contact:
Henry B. Morris
Phone: (602) 891-2194
Informal collaborator: Lawrence Livermore National Laboratory
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of Contents or go to next section.
Date created: April
2002
Last updated:
April 12, 2005
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