Fabrication and Dielectric Characterization of (Ba,Sr)TiO₃ Thin Film Libraries

Debra L. Kaiser⁽¹⁾, J. Armstrong⁽²⁾, Judith E. Devaney⁽³⁾, Barbara A. am Ende³, Howard K. Hung³, R. Marinenko², Steven W. Robey², Peter K. Schenck¹, and Stephan J. Stranick*²

Dielectric oxide thin films have potential widespread application in future wireless communication and computing systems. During the past year, we have developed novel measurement and fabrication tools and methodologies for combinatorial studies of dielectric films. The first is a microwave frequency near-field microscope for mapping the dielectric properties at high frequency (up to 20 GHz). The second is a dual-target, dual-beam pulsed laser deposition (PLD) system with in situ process monitor and control capabilities for fabricating the film libraries. These two tools will be described in detail. To date, compositionally-graded (Ba,Sr)TiO₃ thin films have been deposited in the PLD system using BaTiO₃ and SrTiO₃ targets. Film composition maps were determined by wavelength dispersive x-ray spectrometry and thickness maps were obtained by semi-automated reflectance mode spectrophotometry. Maps of the dielectric constant and loss in the libraries were measured with the microwave microscope and correlated with the film composition. Informatic protocols for the dielectric data analysis and management will also be discussed.

Biography

Debra L. Kaiser received a B.S. in Materials Science from Lehigh University, an M.S. in Metallurgical Engineering from the Colorado School Of Mines, and a Sc.D. in Metallurgy from the Massachusetts Institute of Technology (Dissertation on Thermodynamics of Copper-Iron Mattes). From 1985 to 1987, she was an IBM Postdoctoral Fellow at the IBM Research Center in Yorktown Heights. Dr. Kaiser joined the Ceramics Division, National Institute of Standards and Technology in 1988 and studied the growth and thermomechanical detwinning of Yba₂cu₃o_7-X single crystals; magnetic and electrical characterization of Yba₂cu₃o_7-X single crystals; magneto-optical imaging of high temperature superconductors; and flux pinning behavior. Dr. Kaiser is currently a Group Leader for Thin Film Characterization and Properties in the Ceramics Division of the National Institute of Standards and Technology. Dr. Kaiser has received numerous awards and honors including the Sigma Xi Young Scientist Award, NIST Chapter, 1995; American Association For Crystal Growth Young Author Award, 1993; Bronze Medal Award, U.S. Dept. Of Commerce, 1990; IBM Outstanding Technical Achievement Award, 1989. She is a member of Phi Beta Kappa, Tau Beta Pi, and Sigma Xi.

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